Product Overview
The HVA 11210-0203RS-001 is a pneumatically actuated stainless steel gate valve from the 11000 Series Standard Cycle family built by HVA LLC (High Vacuum Apparatus) of Reno, Nevada, a manufacturer that has been producing vacuum valves since 1973. Decoding the part number places the HVA 11210-0203RS-001 precisely: the leading 11 identifies the 11000 Series, the following 2 specifies a pneumatic actuator, the 1 selects Viton gate and bonnet seals for high-vacuum service, the 020 gives a 2-inch (DN 50) port, the 3 selects KF/ISO-F flanging, R indicates a reed switch position indicator, S and the -001 suffix denote a valve built to a custom configuration. In practical terms, the HVA 11210-0203RS-001 is a straight-through isolation valve that opens to give an unobstructed full-bore flow path and closes to seal a vacuum space from atmosphere or from an adjacent chamber.
What gives the HVA 11210-0203RS-001 its reputation in demanding vacuum systems is the combination of three design decisions. Linear actuation lets the actuator be sealed with a welded AM-350 bellows, so there is no rotary shaft seal to leak or to generate particles inside the vacuum. The 304 stainless steel body and all major internal components are vacuum furnace brazed at 1100°C under 1×10⁻⁶ Torr, which eliminates virtual leaks and trapped volumes and minimises the distortion typical of conventionally welded or cast bodies. And the unique air cylinder design reduces shock and vibration at end of travel, which matters enormously in semiconductor, lithography and thin-film tools where a valve slam can disturb a wafer or a beam. Inside the automation and vacuum hierarchy, this valve is the isolation layer between pumps and chambers, and between chambers themselves.
Technical Specifications
| Parameter Name | Parameter Value |
|---|---|
| Product Model | HVA 11210-0203RS-001 (11000 Series, pneumatic, custom configuration) |
| Manufacturer | HVA LLC (High Vacuum Apparatus), Reno, Nevada, USA |
| Product Type | Stainless Steel High / Ultra-High Vacuum Gate Valve |
| Model Decode | 11 = 11000 Series; 2 = pneumatic actuator; 1 = Viton gate and bonnet seals; 020 = 2 in (DN 50) port; 3 = KF/ISO-F flange; R = reed switch position indicator; S/-001 = custom configuration |
| Valve Body and Mechanism | 304 stainless steel, vacuum furnace brazed at 1100°C and 1×10⁻⁶ Torr |
| Welded Bellows Shaft Seal | AM-350 stainless steel |
| Bonnet and Gate Seals | HV: Viton elastomer; UHV: OFHC copper / Viton elastomer |
| Pressure Range | HV 1×10⁻⁹ mbar (1×10⁻⁹ Torr); UHV 1×10⁻¹⁰ mbar |
| Helium Leak Rate | Below 2×10⁻⁹ mbar l/s (2×10⁻¹⁰ AtmCC/sec) |
| Differential Pressure Closed | 1 bar (760 Torr) in either direction |
| Maximum Δ Pressure Before Opening | ≤ 30 mbar (20 Torr) |
| Bakeout Temperature | Elastomer sealed bonnet 150°C; metal sealed bonnet 200°C open / 150°C closed; actuator 60°C |
| Actuation | Pneumatic air cylinder, air service 80 psig (5.5 bar) |
| Solenoid | 4.0 W, 120 VAC 50/60 Hz; optional 24, 200, 240 VAC; 12, 24 VDC |
| Position Indicator | Reed switch, maximum 115 VAC or 28 VDC at 20 mA |
| Cycles Until Service | 100,000 cycles, application dependent |
| Mounting Position | Any |
| Shipping Dimensions and Weight | Approximately 27.8 × 9.8 × 5.5 cm, 2.28 kg |
| Available Flange Options | KF, ISO-F, ISO-K, CF-F, ASA/ANSI, JIS (as configured) |
Main Features and Advantages
Welded bellows sealing instead of rotary shaft seals: The linear drive architecture of the HVA 11210-0203RS-001 allows the actuator motion to be transmitted through a welded AM-350 bellows, which means the vacuum boundary is a static metal joint rather than a sliding dynamic seal. There is no shaft seal to wear, no lubricant inside the vacuum envelope, and no path for atmospheric gas to migrate into the chamber along a rotating shaft. For processes that run for months between vents, this single design choice removes the most common source of slow, unexplained base-pressure drift.
Vacuum furnace brazed body with the smallest internal surface area: Every HVA 11210-0203RS-001 body is brazed as one assembly in a vacuum furnace at 1100°C and 1×10⁻⁶ Torr. Virtual leaks — the trapped volumes behind pressed or welded joints that outgas for days and limit ultimate pressure — are designed out rather than tolerated, and the brazed construction holds dimensional stability that conventional welded bodies lose. The compact internal geometry gives one of the smallest interior surface areas in the vacuum valve industry, which directly reduces outgassing load and shortens pump-down.
Low-shock, fail-safe pneumatic actuation: The air cylinder of the HVA 11210-0203RS-001 is shaped to cushion end-of-travel, so the gate arrives rather than slams. In lithography, metrology and wafer-handling equipment, that translates into fewer particle events and less mechanical disturbance of sensitive optics and stages. A positive lock-overcenter mechanism or optional soft closure with pneumatic lock holds the valve closed, and the valve maintains a closed status if air pressure is lost — the correct failure direction for a valve protecting a pumped chamber.
Serviceability and configuration flexibility: The carriage assembly of the HVA 11210-0203RS-001 can be withdrawn from the body without removing the valve from the vacuum system, so seal and bellows service happens in place. Reed switch position indication integrates directly with tool PLCs and interlocks, and the custom -001 suffix reflects HVA’s practice of supplying the same proven platform with alternate flange standards, solenoid voltages, seal materials, gauge or roughing ports and high-temperature options built to the system designer’s specification.
