MKS 153D-4-100-2 – Smart Throttle Valve with Digital PID Control

Product Overview

The MKS 153D-4-100-2 is a “Smart” exhaust throttle valve from MKS Instruments, designed for downstream pressure control applications in vacuum systems. The 153D-4-100-2 integrates all control, communication, and driver circuits via a compact “add-on” electronics module within a 253 Throttle Valve assembly, eliminating the need for a separate pressure control electronics module . This integrated design simplifies system architecture and reduces installation complexity for process engineers working with vacuum-based manufacturing equipment.

As a member of the MKS 153D series, the 153D-4-100-2 operates in two distinct modes: flapper positioning or pressure control . In flapper positioning mode, the valve responds to an external set point signal to move the flapper to a commanded position. In pressure control mode, the 153D-4-100-2 uses an internal digital PID algorithm to automatically regulate the valve position based on a pressure set point and feedback signal . The MKS 153D-4-100-2 is specifically engineered for computer-controlled applications where precise, repeatable pressure regulation is essential, such as semiconductor fabrication, vacuum coating, and advanced research systems.

The 153D-4-100-2 designation follows the MKS model code convention, where “153D” identifies the smart throttle valve series, “4” indicates the nominal inside diameter of 3.965 inches (101 mm), and “100” specifies the flange configuration . This valve is supplied as a complete assembly with the integrated electronics module, providing a self-contained solution for downstream pressure control without requiring external controller hardware.

Technical Specifications