Product Overview
The MKS 627B11TBC1B is a 10 Torr heated absolute capacitance manometer from the MKS Instruments Baratron® 627B series — the industry benchmark for high-accuracy vacuum and low-pressure measurement in semiconductor fabrication, thin-film deposition, vacuum research and precision industrial process control. The MKS 627B11TBC1B measures absolute pressure rather than gauge pressure, referencing a sealed vacuum on one side of a thin Inconel diaphragm and a fixed electrode on the other; as process pressure deflects the diaphragm, the resulting capacitance change is detected by a low-impedance, fixed-frequency bridge signal conditioner and converted into a linear 0 to +10 VDC output. This physical measurement principle is independent of gas composition, allowing the MKS 627B11TBC1B to deliver a true total-pressure reading across changing process-gas streams rather than an inferred value tied to a single calibration gas.
A defining feature of the MKS 627B11TBC1B is its 45°C temperature-controlled sensor head. By actively heating the sensor assembly to a stable 45°C, the design decouples the measurement from ambient and process-temperature fluctuations that would otherwise shift zero and span. The updated temperature-control electronics introduced with the 627B generation provide superior long-term stability and repeatability compared with the legacy 627A, and the faster warm-up time means the instrument reaches specification sooner after power-on. The “11TB” segment of the model suffix identifies the 10 Torr full-scale range, while “C1B” denotes the Swagelok 8 VCR female process fitting, 0.12% of reading accuracy class, standard vertical calibration and 15-pin D-subminiature interface connector with thread lock.
The MKS 627B11TBC1B is part of a deliberately interchangeable product family. It mounts and connects identically to earlier 627A, 627D, 627F and 127-series Baratron manometers, and works with MKS power supplies, display units and pressure controllers as well as user-supplied compatible readout devices. This backward compatibility is a significant lifecycle advantage in mature fabs and research facilities, where a failed manometer can be swapped for a MKS 627B11TBC1B without re-plumbing vacuum lines or re-terminating control cabling.
Technical Specifications
| Parameter Name | Parameter Value |
|---|---|
| Product Model | 627B11TBC1B |
| Manufacturer | MKS Instruments, Inc. |
| Product Series | Baratron® 627B (Type 627B) |
| Product Type | Heated absolute capacitance manometer / pressure transducer |
| Measurement Type | Absolute pressure (referenced to sealed vacuum) |
| Full-Scale Pressure Range | 10 Torr (0 to +10 VDC linear output) |
| Accuracy | 0.12% of Reading (includes non-linearity, hysteresis and non-repeatability) |
| Resolution | 0.001% of Full Scale |
| Sensor Technology | Baratron capacitance diaphragm (variable capacitance) |
| Sensor Temperature Control | Heated to 45°C, active temperature regulation |
| Process Fitting | Swagelok® 8 VCR® female vacuum fitting |
| Output Signal | 0 to +10 VDC, linear with pressure, into >10 kΩ load |
| Signal Overrange | 110% of full scale |
| Interface Connector | 15-pin Type D (D-subminiature) with thread lock |
| Cable Requirement | Overall metal-braided shielded cable |
| Power Supply | ±15 VDC ±5% |
| Power Consumption | ≤ 250 mA (0.25 A max) |
| Warm-Up Time | 2 hours at 23°C ambient (4 hours for <1 Torr ranges) |
| Wetted Materials | Inconel® alloy (sensor), Incoloy® and 300-series stainless steel (selected fittings) |
| Enclosure Material | Stainless steel, cleanroom-compatible |
| Internal Volume | 6.3 cc |
| Overpressure Limit | 45 psia (310 kPa) or 120% of F.S., whichever is greater |
| Zero Temperature Coefficient | 0.002% of F.S. / °C (for 1–25,000 Torr range) |
| Span Temperature Coefficient | 0.02% of Reading / °C |
| Ambient Operating Temperature | 15°C to 40°C |
| Response Time | < 20 msec (< 40 msec for ≤1 Torr ranges) |
| Measurement Span | Minimum four decades |
| Adjustments | Zero potentiometer (±1.0%) and coarse zero switch (±20%) |
| Compliance | CE compliant (EMC Directive 2004/108/EC, Product Safety Directive 92/59/EC, RoHS) |
| Calibration Orientation | Vertical |
