MKS 626A01TBE Absolute Capacitance Manometer — Unheated 1 Torr Sensor for OEM Semiconductor Tools

Application Scenarios: Inside a plasma etch chamber running a fluorine-based chemistry on a 200 mm wafer line, chamber pressure control is a closed-loop discipline: the throttle valve’s position is constantly trimmed by the feedback signal from the capacitance manometer, and any drift, noise, or zero shift in that signal propagates directly into etch-rate variation across the wafer. That is exactly the role the 626A01TBE was engineered to fill — a 1 Torr full-scale absolute gauge that resolves pressure changes down to ~10⁻⁵ of full scale and converts them to a clean 0–10 VDC signal that MKS throttle valves, pressure controllers, and downstream PLC/DCS inputs can consume without additional scaling. Because the reference side is permanently sealed and maintained by an internal chemical getter, the manometer needs no zero re-purge in normal operation, and its all-welded Inconel construction tolerates the corrosive byproducts that condense inside the sensing port during aggressive etch chemistry. For legacy 200 mm tool fleets, older R&D platforms, and OEM rebuild programs where the original 626A01TBE is still the drawing-referenced part number, maintaining this specific model in the spares inventory is often the difference between a same-day board-level fix and a multi-week retrofit to a successor package.

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