ASML 4022.436.7217 DC Converter Board – Genuine Lithography Power Conversion Spare

Brand ABB

Model ASML 4022.436.7217

Product Overview

The ASML 4022.436.7217 is a precision DC converter board developed for the power distribution and laser drive architecture inside ASML lithography systems, the wafer steppers and scanners that define advanced semiconductor manufacturing. Supplied and referenced in the field together with its companion revision ASML 4022.436.72172, this assembly is catalogued in the secondary market as an ASML alignment laser drive board with interlock, which confirms that its role sits within the alignment and metrology subsystem rather than the exposure optics themselves. In practical terms, the ASML 4022.436.7217 takes the DC bus voltage present in the machine’s electronics cabinet and converts it into the tightly regulated, low-noise rails required by the alignment laser head, its control electronics and the associated sensor interfaces.

What makes the ASML 4022.436.7217 critical is not the wattage it handles but the quality of the power it delivers. Alignment subsystems in a lithography tool resolve overlay and position at the nanometre scale, and any ripple, drift or transient on the supply rail translates directly into measurement noise, alignment scatter and ultimately yield loss. The board therefore combines a switching conversion stage with filtering, protection and an interlock chain that removes the drive output the moment a door, cover or safety condition is violated, protecting both the laser source and the operator. Because ASML qualifies each board assembly against a specific machine configuration, the ASML 4022.436.7217 is a machine-critical line-replaceable unit: keeping a verified spare on the shelf is the difference between a short maintenance window and an extended tool-down event measured in days of lost wafer output.

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Description

Technical Specifications

Parameter Name	Parameter Value
Product Model	4022.436.7217 (paired with 4022.436.72172)
Manufacturer	ASML (Netherlands)
Product Type	DC Converter / Laser Drive Power Board Assembly
Product Family	ASML 4022.436 series machine electronics
Function	DC-DC conversion and regulated supply for alignment laser and sensor electronics
Input Voltage Range	12 V to 48 V DC (typical system DC bus)
Nominal Output Voltage	24 V DC regulated rail (laser drive supply)
Output Current	Application dependent, low-power precision rail
Conversion Efficiency	Up to 95% typical
Output Regulation Accuracy	±0.05% to ±0.5% depending on configuration
Protection Features	Overvoltage, overcurrent, short-circuit and interlock shutdown
Response Time	Less than 1 ms for transient and interlock response
Operating Temperature	-40 °C to +85 °C (board level)
Cleanroom Operating Range	0 °C to +45 °C in installed system environment
Storage Temperature	-20 °C to +60 °C
Humidity	10% to 90% RH, non-condensing
Mounting Type	Panel / card-cage mount inside system electronics enclosure
Board Dimensions	Approximately 145 mm x 100 mm x 35 mm
Weight	Approximately 0.5 kg
On-board Sub-assemblies	Industrial 24 V switching supply module and control PCB (e.g. TDK HWS15A-24 class devices)
Interface / Connector	Multi-pin system harness plus interlock loop connectors
Certifications	CE, FCC, UL and RoHS compliant as applicable
Condition Supplied	New original, refurbished or tested used, subject to availability

Main Features and Advantages

Regulated power for nanometre-scale metrology:

The ASML 4022.436.7217 is engineered around the needs of the alignment subsystem, where supply noise becomes measurement error. By combining a high-efficiency switching stage with output filtering and tight load regulation, the board holds its output rail stable through line and load transients, so interferometer and alignment sensor readings remain repeatable across a full production lot. Conversion efficiency reaching 95% also matters thermally: less dissipated heat inside a sealed electronics cabinet means less drift in adjacent analogue circuitry and a longer service life for the board itself.

Integrated safety interlock architecture:

Unlike a generic industrial DC-DC module, the ASML 4022.436.7217 incorporates an interlock chain that is wired into the machine’s safety system. Whenever an access panel is opened or a safety condition is breached, the drive output is inhibited rather than simply alarmed, which protects the laser assembly from uncontrolled emission and prevents personnel exposure. This hardware-level inhibition is a deliberate design choice, because it remains effective even if higher-level control software is unresponsive.

Built-in protection against plant power events:

Semiconductor fabs are electrically noisy environments, with large motors, chiller compressors and RF generators switching continuously. The ASML 4022.436.7217 integrates overvoltage, overcurrent and short-circuit protection on board, so a cable fault or an upstream surge results in a controlled shutdown and a logged fault instead of a cascading failure that damages downstream sensor electronics. Response to a transient condition is under one millisecond, fast enough to stay ahead of semiconductor junction damage.

Service-friendly form factor and traceability:

Mechanically, the ASML 4022.436.7217 is a compact, panel-mountable assembly that fits the space-constrained electronics bays of lithography tools, and its connectorised design allows replacement without re-terminating field wiring. Each unit carries ASML part-number and revision labelling, which is essential for revision control in a fab where identical-looking boards may have incompatible firmware or calibration, and each board can be matched to a specific tool serial number before dispatch.